ex-situ XPS

IMG 20110922 164041


We currently have a dedicated XPS system for surface characterization comprised of:

  • UHV vacuum system,
  • XPS VG CLAM 3-channeltron spectrometer,
  • Dual X-ray Leybold gun
  • manipulator with fast-load-lock entry system
  • Ar ion gun for sputter cleaning and depth profiling





2013-01-14 10.20.11

 Sin titulo

Ti 2p XPS spectra recorded from TiCrN coatings after oxidation at different temperatures. 

The TiN and TiOxNy contributions present in the original coating are oxidized to TiO2 as 

temperature increases